PreAlignment Mark location validation?

[demisjohn]

ASML_JobCreator does not currently check whether Prealignment marks are in "allowed" prealignment regions.

However, I do not know if all ASML PAS systems have the same allowed PM locations. If not, adding this check could break the module for other ASML PAS systems.

Possibly only pop a "Warning" (not error) if the marks are determined to be outside the allowed area?

The function that adds the marks should pop the warning:
Layer.set_PreAlignment( )
in Layer.py

Here are the allowed regions:

Uncovered by Ted Morin.

[fyodr]

Implemented on my fork with numbers from this figure hard-coded.

[demisjohn]

@fyodr could you kindly provide a link to the relevant code lines on your fork?

[fyodr]

See Layers.py, lines 427-467.

[demisjohn]

Great,
Please make the R_min (from
Here https://github.com/fyodr/ASML_JobCreator/blob/b6da8c976f3c3ba702e96867bc2bdf13dbb553d3/ASML_JobCreator/Layer.py#L434 ) a new variable in Defaults.py,

for example Defaults.py below this line:
https://github.com/fyodr/ASML_JobCreator/blob/b6da8c976f3c3ba702e96867bc2bdf13dbb553d3/ASML_JobCreator/Defaults.py#L146
maybe variable name can be
AlignmentMark_PreAlignLocation_MinRadius
Or similar, with a quick comment stating what this is for (since it’s not directly coded Into the text output like many of the other defaults are)

[demisjohn]

Then I’d love to merge this back to master.

[fyodr]

Done.